现代真空镀膜机电气控制系统的设计与实现_丁雪成.pdfVIP

电子测量与仪器学报 2008 年增刊 现代真空镀膜机电气控制系统的设计与实现 1 2 2 2 丁雪成 冯震宇 吴丽颖 单允章 （1.西南交通大学电气工程学院，成都 610031; 2.北京北仪创新真空技术有限责任公司，北京 102600） 摘要: 真空镀膜机是在真空条件下制备薄膜于基体表面的设备。论述了真空镀膜机的发展趋势和总体构成。结合镀膜工艺 流程，对电气控制系统软、硬件结构进行了论证分析和相应的设计。同时介绍了PLC的选型，最终实现了以欧姆龙PLC为核心 的现代真空镀膜机控制系统。该电气控制系统具有手动/自动控制、故障报警等功能。系统经过了实验室和现场的两步调试， 解决了潜在问题。最终生产实践证实了该系统的可行性，实现了工艺要求，满足了客户需求。 关键词: PLC ；真空镀膜机；电气控制 中图分类号：TP273；TB43 文献标志码：B Design and Implementation of Modern Vacuum Coating Machine Electric Control System 1 2 2 2 Ding Xuecheng Feng Zhenyu Wu Liying Shan Yunzhang (1.School of Electric Engineering，Southwest Jiaotong University ,Chengdu 610031,China; 2. Beijing Beiyi Innovation Vacuum Technology CO., LTD. Beijing 102600, China) Abstract : The vacuum coating machine is a kind of equipment which coats film on the surface of the object in the vacuum condition. The development trend and overall constitution of vacuum coating machine is introduced. Combined with film coating technological process, a demonstration analyzing and corresponding design to the structure of the electric control system software and hardware have been discussed. At the same time, the selection of the PLC is introduced. It is realized that OMRON PLC is the center of control system of modern vacuum coating machine .The electric control system has the function of manual / automatic control, giving an alarm and protection when the system is out of control, and so on. Some potential problems have been solved by lab testing and field debugging. Finally, the feasibility of the system is confirmed by productive practice, so it can realize