Journal of Ceramic Processing Research. Vol. 13, （陶瓷加工研究杂志》上。）.pdfVIP

Journal of Ceramic Processing Research. Vol. 13, Special. 2, pp. s328~s331 (2012) J O U R N A L O F Ceramic Processing Research Characteristics of Rhenium-Iridium coating thin film on tungsten carbide by multi-target sputter a b a, Min-Woo Cheon , Tae-Gon Kim , Yong-Pil Park * aDepartment of Biomedical Science, Dongshin University, Naju 520-714, Korea bDepartment of Electrical and Electronic Engineering, Dongshin University, Naju 520-714, Korea With the recent development of super-precision optical instruments, camera modules for devices, such as portable terminals and digital camera lenses, are increasingly being used. Since an optical lens is usually produced by high-temperature compression molding methods using tungsten carbide (WC) alloy molding cores, it is necessary to develop and study technology for super-precision processing of molding cores and coatings for the core surface. In this study, Rhenium-Iridium (Re-Ir) thin films were deposited onto a WC molding core using a sputtering system. The Re-Ir thin films were prepared by a multi-target sputtering technique, using iridium, rhenium, and chromium as the sources. Argon and nitrogen were introduced through an inlet into the chamber to be the plasma and reactive gases. The Re-Ir thin films were prepared with targets having a composition ratio of 30 : 70, and the Re-Ir thin films were formed with a 240 nm thickness. Re-Ir thin films on WC molding c