高磁损耗型fecob-sio2纳米颗粒膜的微结构与微波电磁特性 microstructure and microwave characteristics of high loss fecob-sio2 nano-granular films.pdfVIP

研究·分析·实验 高磁损耗型 FeCoB-SiO2 纳米颗粒膜的 微结构与微波电磁特性 邓联文，熊惟皓，江建军，冯则坤，何华辉 （华中科技大学电子科学与技术系，湖北武汉 430074 ） 摘 要：采用磁控溅射工艺制备了磁损耗型 FeCoB-SiO 磁性纳米颗粒膜。利用 X 射线衍射仪、扫描探针显 2 微镜、透射电子显微镜观测样品的微结构和形貌特征，采用振动样品磁强计、四探针法、微波矢量分析仪及微 带短路扫频测量方法测量薄膜试样的磁电性能和微波磁导率。重点分析了 SiO2 电介质含量、薄膜微结构对样品 电磁性能的影响。结果表明，所制备的 FeCoB-SiO2 纳米颗粒膜具有良好的软磁性能和高频电磁性能，2GHz 时 复磁导率实部和虚部均高于 80，可以应用于抗电磁干扰和微波吸收材料。 关键词：FeCoB-SiO2 纳米颗粒膜；微结构；复磁导率 中图分类号：O484.4+3 文献标识码：A 文章编号：1001-3830(2006)04-0014-03 Microstructure and Microwave Characteristics of High Loss FeCoB-SiO2 Nano-granular Films DENG Lian-wen, XIONG Wei-hao, JIANG Jian-jun, FENG Ze-kun, HE Hua-hui Department of Electronic Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, China Abstract: FeCoB-SiO2 nano-granular films with high magnetic loss were synthesized by RF magnetron sputtering. Microstructures and morphology were analyzed by XRD, SPM and TEM. The magnetic parameters were measured by VSM. The electrical resistivity was measured by dc four-probe method and the complex permeability spectra were measured by vector network analyzer. Effects of SiO2 volume fraction on the microstructure and electromagnetic properties were investigated and the mechanism was also discussed. Results show that these films have excellent performance in high frequency. Both real and imaginary part of complex permeability are larger than 80 at 2 GHz. Thus, the films may be applied as microwave absorbers in GHz range. Key words: FeCoB-SiO2 nano-granular film; microstructure; complex permeability