power device课件.pptVIP

Power MOSFET design and technology;? Power devices : application fields ? Power MOS : structure and technology ? Technological Road-map HV and LV devices ;APPLICATION FIELDSOF POWER DEVICES;APPLICATION FIELDS FOR POWER DEVICES ;Frequency [Hz];POWER MOSFETSTRUCTURE AND TECHNOLOGY;X ~ 600 mm;N+;N+;N+;N+;N+;N+;P+;Body (Boron) ionic implant Body diffusion;Source (As,P) ionic implant;Channel making (3);Contacts photolithography (mask and etch);Passivation;Back finishing process steps;Passivation (Nitride);N++;N++;3D PMOS structure ;PMOS layout (STW15NB50);PMOS : 2D simulation result in a