真空度的稳定和气流控制的优（The stability of vacuum and the superiority of airflow control）.docVIP

真空度的稳定和气流控制的优（The stability of vacuum and the superiority of airflow control） With the rapid development of the domestic large diameter Czochralski technique, some of the original in the small diameter crystal did not pay attention to the problem, the negative impact of large diameter single crystal growth gradually. The large diameter crystal needs high stability on the growth environment. In this paper, the vacuum stability and airflow control optimization in two aspects, put forward the improvement scheme, in order to improve the rate and quality of large diameter crystal growth. Key words: Czochralski method; large diameter single crystal; vacuum stability; flow control 1 introduction of semiconductor technology change rapidly promoted the crystal growth of silicon technology to the development of large diameter direction. At present, the domestic large diameter Czochralski single crystal manufacturing scale production has just started, many technology is still in the exploratory stage. The growth of large diameter single crystal dislocation free, its growth environment has high stability. This makes some factors damage the stability of crystal growth, has little effect on the original small diameter single crystal growth, but the negative impact of large diameter single crystal growth is increasingly obvious. In the process of growth of Czochralski single crystal, gas flow from top to bottom in furnace through the crystal growth of silicon oxide and impurity region, timely take produced by high temperature volatiles. Therefore, to maintain stability in vacuum furnace value, is not affected by external factors, and make a reasonable protective gas flows to rapidly remove impurities, has become the current semiconductor manufacturing industry improved equipment, improve the important topic of crystal growth. Injection from single crystal furnace top high purity argon 2 stability of vacuum control, the bottom of the gas is pumped out by a vacuum pump, a vacuum fur