采用ald方法制备tio2al2o3布拉格反射镜并配合金属反射镜来增强背镀结构的反射效率 high reflectance of backside reflector with a hybrid metallic mirror and ald-tio2al2o3 dbr.pdfVIP

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采用ald方法制备tio2al2o3布拉格反射镜并配合金属反射镜来增强背镀结构的反射效率 high reflectance of backside reflector with a hybrid metallic mirror and ald-tio2al2o3 dbr.pdf

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采用ald方法制备tio2al2o3布拉格反射镜并配合金属反射镜来增强背镀结构的反射效率 high reflectance of backside reflector with a hybrid metallic mirror and ald-tio2al2o3 dbr

第36卷第4期电子器件 V01．36No．4 Chinese】o哪alofEIectmIlDevices 2013年8月 Aug．2013 Mirror Renector丽tha MetalⅡc RenectanceofBacbide Hybrid High 4 aIld DBR ALD-Ti02／A1203 cHE

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