流场分布对纳米结构模板电沉积成型质量的影响-中南大学学报.pdfVIP

第 48 卷第 5 期 中南大学学报( 自然科学版) Vol.48 No.5 2017 年 5 月 Journal of Central South University (Science and Technology) May 2017 DOI: 10.11817/j.issn.1672-7207.2017.05.013 流场分布对纳米结构模板电沉积成型质量的影响 吕辉，蒋炳炎，翁灿，周明勇，黎醒 ( 中南大学 高性能复杂制造国家重点实验室，湖南 长沙，410083) 摘要：提出采用新型阴极多自由度运动电沉积技术制作纳米结构模塑成型镍模板，研究不同流场分布状态下电沉 积成型模板的厚度分布、表面质量和纳米结构成型精度。研究结果表明：阴极定轴转动可使其表面流体流动增强， 但对电解液的整体搅拌作用较弱，需辅助高压空气搅拌等措施以增强传质效果；阴极水平往复运动对电解液整体 搅拌作用较强，但阴极表面电铸液流动性较差，上部区域存在流动死角；当阴极定轴旋转转速为 150 r/min，水平 往复移动速度为 250 mm/s 时，镀层厚度偏差可分别降低至 17.26%和 20.93% ；运动阴极电沉积制得的镍模板表面 气孔缺陷明显减少，纳米结构的复制精度显著提高，可应用于纳米结构模塑成型工艺。 关键词：纳米结构；电沉积；流体分布；厚度均匀性；表面质量 中图分类号：TQ15 文献标志码：A 文章编号：1672−7207(2017)05−1211−07 Effect of fluid filed distribution on quality of electrodeposited stamp with nanostructures LÜ Hui, JIANG Bingyan, WENG Can, ZHOU Mingyong, LI Xing (State Key Laboratory of High Performance Complex Manufacturing, Central South University, Changsha 410083, China) Abstract: The cathode multi-DOF motion electrodeposition technology was introduced to fabricate high quality nickel nano-molding stamps. The stamps were electrodeposited at different fluid field distributions, and their thickness uniformity, surface quality and accuracy of nanostructures were studied. The results show that the rotating cathode can increase solution flow on the cathode surface but not for the whole electrolyte. An assistant agitation method such as air stirring should be applied. Reciprocating moving cathode has better effect on agitating the whole electrolyte but it leads to a weak flow on the cathode surface. When cathode rotates at