remote plasma maintenance in low-pressure discharges with an external magnetic field远程等离子体维护低压放电与外部磁场.pdf

Journal of Modern Physics, 2012, 3, 1616-1625 /10.4236/jmp.2012.330199 Published Online October 2012 (http://www.SciRP.org/journal/jmp) Remote Plasma Maintenance in Low-Pressure Discharges with an External Magnetic Field 1 1 2 Stiliyan Lishev , Antonia Shivarova , Khristo Tarnev 1Faculty of Physics, Sofia University, Sofia, Bulgaria 2Department of Applied Physics, Technical University-Sofia, Sofia, Bulgaria Email: ashiva@phys.uni-sofia.bg Received August 18, 2012; revised September 16, 2012; accepted September 24, 2012 ABSTRACT The spatial structure of remote plasma regions in rf discharges is analyzed based on a 2D model of free-fall regime dis- charge maintenance. Since the study is directed towards description of the magnetic filter region in the tandem plasma sources of negative hydrogen ions, hydrogen discharges are considered, with a weak magnetic field located outside the region of the rf power deposition. With the formation of different regions in the discharge—the rf power deposition region, the region with electron magnetization, the transition between them and the region behind the filter—the results display superimposed effects of nonlocal discharge maintenance without and with a magnetic field. Slight decrease of the electron temperature accompanied with strong drop of the electron density is the “pure” effect of the plasma expan- sion in regions without external magnetic field. Strong drop of the electron temperature accompanied with formation of a maximum of the electron density in the filter region is the “pure” effect of the plasma expansion through a magnetic field. Based on the results for the spatial dis