schottky junction methane sensors using electrochemically grown nanocrystalline-nanoporous zno thin films肖特基结的甲烷传感器使用电化学nanocrystalline-nanoporous生长氧化锌薄膜.pdf

Hindawi Publishing Corporation Journal of Sensors Volume 2009, Article ID 790476, 9 pages doi:10.1155/2009/790476 Research Article Schottky Junction Methane Sensors Using Electrochemically Grown Nanocrystalline-Nanoporous ZnO Thin Films P. K. Basu,1 N. Saha,1 S. K. Jana,1 H. Saha,1 A. Lloyd Spetz,2 and S. Basu1 1 Department of Electronics Telecommunication Engineering, IC. Design Fabrication Centre, Jadavpur University, Kolkata 700032, India 2 Department of Physics, Chemistry and Biology, Linkoping University, SE-581 83 Linkoping, Sweden ¨ Correspondence should be addressed to S. Basu, sukumar basu@yahoo.co.uk Received 29 December 2008; Accepted 1 July 2009 Recommended by Giorgio Sberveglieri Nanocrystalline-nanoporous ZnO thin films were prepared by an electrochemical anodization method, and the films were tested as methane sensors. It was found that Pd-Ag catalytic contacts showed better sensing performance compared to other noble metal contacts like Pt and Rh. The methane sensing temperature could be reduced to as low as 100◦C by sensitizing nanocrystalline ZnO thin films with Pd, deposited by chemical method. The sensing mechanism has been discussed briefly. Copyright © 2009 P. K. Basu et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. 1. Introduction prepared by electrochemical anodization of high-purity Zn (99.99%). While using Pt catalytic metal electrode methane It is well known that gas se