spiral deposition with alternating indium composition in growing an ingan nanoneedle with the vapor-liquid-solid growth mode螺旋沉积与交替的铟组合在一个增长ingan nanoneedle vapor-liquid-solid增长模式.pdf

Hindawi Publishing Corporation Journal of Nanomaterials Volume 2012, Article ID 653195, 7 pages doi:10.1155/2012/653195 Research Article Spiral Deposition with Alternating Indium Composition in Growing an InGaN Nanoneedle with the Vapor-Liquid-Solid Growth Mode Wen-Ming Chang, Che-Hao Liao, Chih-Yen Chen, Chieh Hsieh, Tsung-Yi Tang, Yean-Woei Kiang, and C. C. Yang Department of Electrical Engineering, Institute of Photonics and Optoelectronics, National Taiwan University, No. 1 Roosevelt Road, Section 4, Taipei 10617, Taiwan Correspondence should be addressed to C. C. Yang, ccy@.tw Received 16 March 2012; Revised 18 June 2012; Accepted 5 July 2012 Academic Editor: Marinella Striccoli Copyright © 2012 Wen-Ming Chang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. The spiral deposition of InGaN with a quasiperiodical distribution of indium content along the growth direction for forming InGaN nanoneedles (NNs) with the vapor-liquid-solid (VLS) growth mode is demonstrated. The VLS growth is implemented by using Au nanoparticles (NPs) as the catalyst in metalorganic chemical vapor deposition. The Au NPs on a GaN template are generated through pulsed laser irradiation. The observation of spiral deposition is based on the analyses of the scanning results in the high angle annular dark field and energy dispersive X-ray measurements of transmission electron microscopy. In the measurements, the composition variations along and perpendicular to the growth direction (the c-axis) are illustrated. The alternating indium content along the growth direction is attributed to a q