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vertical mems resonators for real-time clock applications实时时钟应用程序的垂直mems谐振器.pdfVIP

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vertical mems resonators for real-time clock applications实时时钟应用程序的垂直mems谐振器.pdf

    vertical mems resonators for real-time clock applications实时时钟应用程序的垂直mems谐振器

    Hindawi Publishing Corporation Journal of Sensors Volume 2010, Article ID 362439, 5 pages doi:10.1155/2010/362439 Research Article Vertical MEMS Resonators for Real-Time Clock Applications A. Pomarico,1 A. Morea,1 P. Flora,1 G. Roselli,1 and E. Lasalandra2 1 STMicroelectronics, Via Arnesano Km 5 c/o Distretto Tecnologico ISUFI, Palazzina B, 73100 Lecce, Italy 2 STMicroelectronics, Via Tolomeo 1 20010 Cornaredo, MI, Italy Correspondence should be addressed to A. Pomarico, anna.pomarico@ Received 20 July 2010; Accepted 15 October

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