Introduction to Energy Dispersive Xray （介绍了能量色散x光）.pdf

Introduction to Energy Dispersive X-ray Spectrometry (EDS) 1. Introduction 1.1 Principles of the technique EDS makes use of the X-ray spectrum emitted by a solid sample bombarded with a focused beam of electrons to obtain a localized chemical analysis. All elements from atomic number 4 (Be) to 92 (U) can be detected in principle, though not all instruments are equipped for light elements (Z 10). Qualitative analysis involves the identification of the lines in the spectrum and is fairly straightforward owing to the simplicity of X-ray spectra. Quantitative analysis (determination of the concentrations of the elements present) entails measuring line intensities for each element in the sample and for the same elements in calibration Standards of known composition. By scanning the beam in a television-like raster and displaying the intensity of a selected X-ray line, element distribution images or maps can be produced. Also, images produced by electrons collected from the sample reveal surface topography or mean atomic number differences according to the mode selected. The scanning electron microscope (SEM), which is closely related to the electron probe, is designed primarily for producing electron images, but can also be used for element mapping, and even point analysis, if an X-ray spectrometer is added. There is thus a considerable overlap in the functions of these instruments. 1.2 Accuracy and sensitivity X-ray intensities are measured by counting photons and the precision obtainable is limited by statistical error. For major elements it is usually not difficult to obtain a precision (defined as 2σ) of better than ± 1% (relative), but the overall analytical accuracy is commonly nearer ± 2%, owing to other factors such as uncertainties in the compositions of the standards and errors in the various corrections which need to be applied to the raw data. As well as producing c