A3——新的测试报告.doc

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A3——新的测试报告

Enter N/A in the Initials space if the requested test is Not Applicable due to the basic system configuration. Enter all data in Black Ink. __/__/__ ______ Module Facilitation. Procedure 6000014 __/__/__ ______ Check Jumpers on PIB Jmp1, Jmp2, Jmp3 pins 2-3. __/__/__ ______ Check Jumpers on PIB J51, J52, J53, J54, J55. __/__/__ ______ Power on the Test Module. 6000010 __/__/__ ______ DC Voltage Set Up Measure the voltage on the specified pins on the PIB. Record actual voltage settings below. +24V Power Supply (unswitched) ______volts. +24 (±0.72) @ PIB J1 pin 1 +24V Power Supply (switched) _______volts. (24 (±0.72) @ PIB J1 pin 3 +15V Power Supply _______volts. +15 (±0.45) @ Mano pin 1 –15V Power Supply _______volts. –15 (±0.45) @ Mano pin 2 __/__/__ ______ EMO Operation Test. Procedure: With power to the process module on, press the EMO button and ensure all power to the process module is removed. This is verified by the indicator leds on the process module. __/__/__ ______ Top Plate Fan Orientation Test. Procedure 083-17884-00. Follow step 7.6. __/__/__ ______ Lift Pin Height Adjustment. Procedure 6000009 __/__/__ ______ Heater Temperature Controller Set up Procedure #095-17484-00. Follow Step 7.1.48 to 7.1.56 (Configure Watlow 988-989) __/__/__ ______ Heater Over Temperature Controller Set up Procedure # 095-17485-00 complete. (Eurotherm). Follow Step 7.11 to 7.24 and the NOTE. __/__/__ ______ Heater Power On. Procedure 095-19654-00. Follow Steps 7.6 to 7.13. __/__/__ ______ Foreline Interlock Test. Procedure #095-07206-00. Follow Step 7.2.4 __/__/__ ______ External Thermostat Interlock Test. Procedure 095-07206-00. Follow step 7.2.8. __/__/__ ______ Foreline Heater Jacket Installed and Tested. Ensure Heater Jacket is warm to the touch. __/__/__ ______ Gas Box Regulators Settings. Procedure 083-08045-00. (check config. for applicable gases) * F

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