a microsystem based on porous silicon-glass anodic bonding for gas and liquid optical sensing微系统基于多孔硅玻璃阳极键合的气体和液体光学传感.pdfVIP

Sensors 2006, 6, 680-687 sensors ISSN 1424-8220 © 2006 by MDPI /sensors Full Research Paper A Microsystem Based on Porous Silicon-Glass Anodic Bonding for Gas and Liquid Optical Sensing Luca De Stefano 1,*, Krzysztof Malecki 1, Francesco G. Della Corte 2, Luigi Moretti 2, 1 1 1 Ilaria Rea , Lucia Rotiroti and Ivo Rendina 1 Institute for Microelectronics and Microsystems, National Council of Research, Via P. Castellino 111, 80131 Naples, Italy (E-mail for Ilaria Rea: ilaria.rea@r.it) 2 DIMET “Mediterranea” University of Reggio Calabria, Località Feo di Vito, 89060 Reggio Calabria, Italy * Author to whom correspondence should be addressed. E-mail: luca.destefano@r.it Received: 15 March 2006 / Accepted: 22 June 2006 / Published: 23 June 2006 Abstract: We have recently presented an integrated silicon-glass opto-chemical sensor for lab-on-chip applications, based on porous silicon and anodic bonding technologies. In this work, we have optically characterized the sensor response on exposure to vapors of several organic compounds by means of reflectivity measurements. The interaction between the porous silicon, which acts as transducer layer, and the organic vapors fluxed into the glass sealed microchamber, is preserved by the fabrication process, resulting in optical path increase, due to the capillary condensation of the vapors into the pores. Using the Bruggemann theory, we have calculate