nanoparticle thin films for gas sensors prepared by matrix assisted pulsed laser evaporation纳米薄膜气体传感器由矩阵辅助脉冲激光蒸发.pdfVIP

Sensors 2009, 9, 2682-2696; doi:10.3390/ OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Review Nanoparticle Thin Films for Gas Sensors Prepared by Matrix Assisted Pulsed Laser Evaporation Anna Paola Caricato 1, Armando Luches 1,* and Roberto Rella 2 1 University of Salento, Department of Physics, Via Arnesano, 73100 Lecce, Italy; E-Mail: caricato@le.infn.it; 2 Istituto per la Microelettronica ed i Microsistemi (IMM) CNR, Via Monteroni, 73100 Lecce, Italy; E-Mail: roberto.rella@r.it * Author to whom correspondence should be addressed; E-Mail: luches@le.infn.it; Tel/Fax: +39 0832 297499 Received: 27 February 2009; in revised form: 7 April 2009 / Accepted: 10 April 2009 / Published: 16 April 2009 Abstract: The matrix assisted pulsed laser evaporation (MAPLE) technique has been used for the deposition of metal dioxide (TiO , SnO ) nanoparticle thin films for gas sensor 2 2 applications. For this purpose, colloidal metal dioxide nanoparticles were diluted in volatile solvents, the solution was frozen at the liquid nitrogen temperature and irradiated with a pulsed excimer laser. The dioxide nanoparticles were deposited on Si and Al O 2 3 substrates. A rather uniform distribution of TiO2 nanoparticles with an average size