real-time ozone detection based on a microfabricated quartz crystal tuning fork sensor实时检测基于microfabricated臭氧石英晶体音叉传感器.pdfVIP

Sensors 2009, 9, 5655-5663; doi:10.3390/ OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Real-Time Ozone Detection Based on a Microfabricated Quartz Crystal Tuning Fork Sensor 1,2 1,2 3 2 1,2 Rui Wang , Francis Tsow , Xuezhi Zhang , Jhih-Hong Peng , Erica S. Forzani , Yongsheng Chen 3,#,*, John C. Crittenden 3,#, Hugo Destaillats 3,4,* and Nongjian Tao 1,2,* 1 Biodesign Institute, Arizona State University, Tempe, AZ, 85287-5801 USA 2 Department of Electrical Engineering, Arizona State University, Tempe, AZ, 85287-5801 USA 3 School of Sustainable Engineering and the Built Environment, Arizona State University, Tempe, AZ, 85287-5801 USA 4 Indoor Environment Department, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA # Current address: Georgia Institute of Technology, School of Civil and Environmental Engineering * Authors to whom correspondence should be addressed; E-Mails: njtao@ (N.T.); HDestaillats@ (H.D.); yongsheng.chen@ (Y.C.) Received: 5 June 2009; in revised form: 8 July 2009 / Accepted: 14 July 2009 / Published: 15 July 2009 Abstract: A chemical sensor for ozone based on an array of microfabricated tuning forks is described. The tuning forks are highly sensitive and stable, with low power consumption and cost. The selective detection is based on the specific reaction of the polymer with ozone. With a mass detection limit of ~2 pg/mm2 and response tim