review on the modeling of electrostatic mems回顾静电mems的建模.pdfVIP

Sensors 2010, 10, 6149-6171; doi:10.3390/s100606149 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Review Review on the Modeling of Electrostatic MEMS Wan-Chun Chuang 1, Hsin-Li Lee 2, Pei-Zen Chang 1 and Yuh-Chung Hu 3,* 1 Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan; E-Mails: .tw (W.-C.C.); changpz@.tw (P.-Z.C.) 2 MicroSystems Technology Center, Industrial Technology Research Institute, Taipei, Taiwan. E-Mail: SonyLee@.tw (H.-L.L.) 3 Department of Mechanical and Electromechanical Engineering, Center of Green Technology, National ILan University, ILan, Taiwan * Author to whom correspondence should be addressed; E-Mail: ychu@.tw. Received: 9 March 2010; in revised form: 18 May 2010 / Accepted: 24 May 2010 / Published: 21 June 2010 Abstract: Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices. Keywords: electrostatics; electromechanics; MEMS; pull-in voltage 1. Introduction Micro-Electro-Mechanical Systems (MEMS) are an electromechanical integrated system where the feature size