simultaneous patterning of independent metalmetal oxide multi-layer films using two-tone photo-acid generating compound systems深浅不一的同步模式的独立metalmetal氧化物多层电影使用photo-acid生成复合系统.pdfVIP

下载本文档

3
0
约7.34万字
约 17页
2017-09-12 发布于上海
举报
版权申诉

simultaneous patterning of independent metalmetal oxide multi-layer films using two-tone photo-acid generating compound systems深浅不一的同步模式的独立metalmetal氧化物多层电影使用photo-acid生成复合系统.pdf

1、原创力文档（book118）网站文档一经付费（服务费），不意味着购买了该文档的版权，仅供个人/单位学习、研究之用，不得用于商业用途，未经授权，严禁复制、发行、汇编、翻译或者网络传播等，侵权必究。。
2、本站所有内容均由合作方或网友上传，本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺！文档内容仅供研究参考，付费前请自行鉴别。如您付费，意味着您自己接受本站规则且自行承担风险，本站不退款、不进行额外附加服务；查看《如何避免下载的几个坑》。如果您已付费下载过本站文档，您可以点击这里二次下载。
3、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等，请点击“版权申诉”（推荐），也可以打举报电话：400-050-0827(电话支持时间：9:00-18:30)。
4、该文档为VIP文档，如果想要下载，成为VIP会员后，下载免费。
5、成为VIP后，下载本文档将扣除1次下载权益。下载后，不支持退款、换文档。如有疑问请联系我们。
6、成为VIP后，您将拥有八大权益，权益包括：VIP文档下载权益、阅读免打扰、文档格式转换、高级专利检索、专属身份标志、高级客服、多端互通、版权登记。
7、VIP文档为合作方或网友上传，每下载1次，网站将根据用户上传文档的质量评分、类型等，对文档贡献者给予高额补贴、流量扶持。如果你也想贡献VIP文档。上传文档

simultaneous patterning of independent metalmetal oxide multi-layer films using two-tone photo-acid generating compound systems深浅不一的同步模式的独立metalmetal氧化物多层电影使用photo-acid生成复合系统

Nanomaterials 2012, 2, 312-328; doi:10.3390/nano2040312 OPEN ACCESS nanomaterials ISSN 2079-4991 /journal/nanomaterials Article Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems Christopher E. J. Cordonier * and Hideo Honma Materials Surface Engineering Research Institute, Kanto Gakuin University, 1-1-1 Fukuura, Kanazawa, Yokohama 236-8501, Japan; E-Mail: honma@kanto-gakuin.ac.jp * Author to whom correspondence should be addressed; E-Mail: chris@kanto-gakuin.ac.jp; Tel.: +81-45-353-9747; Fax: +81-45-370-7132. Received: 29 June 2012; in revised form: 20 September 2012 / Accepted: 24 September 2012 / Published: 16 October 2012 Abstract: (1) The photo-induced solubility and positive-tone direct photo-patterning of iron, copper and lanthanides chelated with 4-(2-nitrobenzyloxycarbonyl)catechol (NBOC) or 4-(6-nitroveratryloxycarbonyl)catechol (NVOC) was investigated. Photo-patterning of iron, copper, cerium, samarium, europium, terbium, dysprosium, holmium, erbium and lutetium complexes was accomplished. Continuous films were formed by the pyrolysis of metal complex films at 500 °C. (2) Based on the difference in the photo-reaction excitation wavelength profile of NBOC and NVOC complexes, a short and simple method for simultaneous micro-patterning of two independent films on each side of a transparent glass substrate was developed. Using the developed procedure, ind