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su-8 guiding layer for love wave devicessu-8指导层乐甫波设备.pdf

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su-8 guiding layer for love wave devicessu-8指导层乐甫波设备

Sensors 2007, 7, 2539-2547 sensors ISSN 1424-8220 © 2007 by MDPI /sensors Full Paper SU-8 Guiding Layer for Love Wave Devices Paul Roach*, Shaun Atherton, Nicola Doy, Glen McHale and Michael I. Newton School of Science and Technology, Nottingham Trent University, Clifton Campus, Nottingham. NG11 8NS. United Kingdom * Author to whom correspondence should be addressed; Email: Paul.Roach@ntu.ac.uk; Tel: +44(0)115-848-8062; Fax: +44(0)115-848-6616 Received: 1 October 2007 / Accepted: 31 October 2007 / Published: 1 November 2007 Abstract: SU-8 is a technologically important photoresist used extensively for the fabrication of microfluidics and MEMS, allowing high aspect ratio structures to be produced. In this work we report the use of SU-8 as a Love wave sensor guiding layer which allows the possibility of integrating a guiding layer with flow cell during fabrication. Devices were fabricated on ST-cut quartz substrates with a single-single finger design such that a surface skimming bulk wave (SSBW) at 97.4 MHz was excited. SU-8 polymer layers were successively built up by spin coating and spectra recorded at each stage; showing a frequency decrease with increasing guiding layer thickness. The insertion loss and frequency dependence as a function of guiding layer thickness was investigated over the first Love wave mode. Mass loading sensitivity of the resultant Love wave