su-8 cantilevers for biochemical sensing; fabrication, characterisation and development of novel read-out methods为生化传感su-8悬臂梁;.pdfVIP

下载本文档

1
0
约5.12万字
约 18页
2017-09-12 发布于上海
举报
版权申诉

su-8 cantilevers for biochemical sensing; fabrication, characterisation and development of novel read-out methods为生化传感su-8悬臂梁;.pdf

1、本文档共18页，可阅读全部内容。
2、原创力文档（book118）网站文档一经付费（服务费），不意味着购买了该文档的版权，仅供个人/单位学习、研究之用，不得用于商业用途，未经授权，严禁复制、发行、汇编、翻译或者网络传播等，侵权必究。
3、本站所有内容均由合作方或网友上传，本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺！文档内容仅供研究参考，付费前请自行鉴别。如您付费，意味着您自己接受本站规则且自行承担风险，本站不退款、不进行额外附加服务；查看《如何避免下载的几个坑》。如果您已付费下载过本站文档，您可以点击这里二次下载。
4、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等，请点击“版权申诉”（推荐），也可以打举报电话：400-050-0827(电话支持时间：9:00-18:30)。
5、该文档为VIP文档，如果想要下载，成为VIP会员后，下载免费。
6、成为VIP后，下载本文档将扣除1次下载权益。下载后，不支持退款、换文档。如有疑问请联系我们。
7、成为VIP后，您将拥有八大权益，权益包括：VIP文档下载权益、阅读免打扰、文档格式转换、高级专利检索、专属身份标志、高级客服、多端互通、版权登记。
8、VIP文档为合作方或网友上传，每下载1次，网站将根据用户上传文档的质量评分、类型等，对文档贡献者给予高额补贴、流量扶持。如果你也想贡献VIP文档。上传文档

su-8 cantilevers for biochemical sensing; fabrication, characterisation and development of novel read-out methods为生化传感su-8悬臂梁;

Sensors 2008, 8, 1595-1612 sensors ISSN 1424-8220 © 2008 by MDPI /sensors Review SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods Maria Nordström 1,*, Stephan Keller 1, Michael Lillemose 1, Alicia Johansson 2, Søren Dohn 1, 3 1 1 1 Daniel Haefliger , Gabriela Blagoi , Mogens Havsteen-Jakobsen and Anja Boisen 1 MIC – Department of Micro and Nanotechnology, Technical University of Denmark, DTU building 345 East, DK-2800 Kongens Lyngby, Denmark 2 Now at PhotoSolar ApS, Denmark 3 Now at HARTING Mitronics AG, Switzerland * Author to whom correspondence should be addressed; E-mail: man@mic.dtu.dk Received: 2 November 2007 / Accepted: 3 March 2008 / Published: 10 March 2008 Abstract: Here, we present the activities within our research group over the last five years with cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interesting polymer for fabrication of cantilevers for bio/chemical sensing due to its simple processing and low Young’s modulus. We show examples of different integrated read-out methods and their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity to changes in the environmental temperature and pH of the buffer solution. Moreover, we show that the SU-8 cantilever surface can be functionalised directly with recept