suppression of air refractive index variations in high-resolution interferometry压抑的空气折射率高分辨率干涉法的变化.pdfVIP

Sensors 2011, 11, 7644-7655; doi:10.3390/s110807644 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Suppression of Air Refractive Index Variations in High-Resolution Interferometry Josef Lazar *, Ondřej Číp, Martin Čížek, Jan Hrabina and Zdeněk Buchta Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic; E-Mails: ocip@isibrno.cz (O.C.); cizek@isibrno.cz (M.C.); shane@isibrno.cz (J.H.); buchta@isibrno.cz (Z.B.) * Author to whom correspondence should be addressed; E-Mail: joe@isibrno.cz; Tel.: +420-541-514-253; Fax: +420-541-514-402. Received: 16 June 2011; in revised form: 23 July 2011 / Accepted: 24 July 2011 / Published: 2 August 2011 Abstract: The influence of the refractive index of air has proven to be a major problem on the road to improvement of the uncertainty in interferometric displacement measurements. We propose an approach with two counter-measuring interferometers acting as a combination of tracking refractometer and a displacement interferometer referencing the wavelength of the laser source to a mechanical standard made of a material with ultra-low thermal expansion. This technique combines length measurement within a specified range with measurement of the refractive index fluctuations in one axis. Errors caused by differen