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design considerations for a micromachined proportional control valve微型机械比例控制阀的设计考虑
Micromachines 2012, 3, 396-412; doi:10.3390/mi3020396
OPEN ACCESS
micromachines
ISSN 2072-666X
/journal/micromachines
Article
Design Considerations for a Micromachined Proportional
Control Valve
Maarten S. Groen 1,*, Dannis M. Brouwer 2,3, Remco J. Wiegerink 1 an
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