design of higher-k and more stable rare earth oxides as gate dielectrics for advanced cmos deviceshigher-k设计和更稳定的稀土氧化物作为先进cmos器件的栅极电介质.pdfVIP
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design of higher-k and more stable rare earth oxides as gate dielectrics for advanced cmos deviceshigher-k设计和更稳定的稀土氧化物作为先进cmos器件的栅极电介质
Materials 2012, 5, 1413-1438; doi:10.3390/ma5081413
OPEN ACCESS
materials
ISSN 1996-1944
/journal/materials
Review
Design of Higher-k and More Stable Rare Earth Oxides as
Gate Dielectrics for Advanced CMOS Devices
Yi Zhao
Sc
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