半导体制造技术4.pdf

Semiconductor Manufacturing Technology Michael Quirk Julian Serda © October 2001 by Prentice Hall Chapter 4 Silicon and Wafer Preparation Semiconductor Manufacturing Technology © 2001 by Prentice Hall by Michael Quirk and Julian Serda Objectives After studying the material in this chapter, you will be able to: 1. Describe how raw silicon is refined into semiconductor grade silicon. 2. Explain the crystal structure and growth method for producing monocrystal silicon. 3. Discuss the major defects in silicon crystal. 4. Outline and describe the basic process steps for wafer preparation, starting from a silicon ingot and finishing with a wafer. 5. State and discuss seven quality measures for wafer suppliers. 6. Explain what is epitaxy and why it is important for wafers. Semiconductor Manufacturing Technology © 2001 by Prentice Hall by Michael Quirk and Julian Serda Semiconductor-Grade Silicon Steps to Obtaining Semiconductor Grade Silicon (SGS) Step Description of Process Reaction Produce metallurgical grade 1 silicon (MGS) by heating SiC (s) + SiO (s)  Si (l) + SiO(g) + CO (g) 2 silica with carbon Purify MG silicon through a chemical reaction to produce 2 Si (s) + 3HCl (g)  SiHCl (g) + H (g) + heat a silicon-bearing gas of 3