微电子机械系统.IntroMEMS.pdf

MECH 6046 Microsystems for Energy, Biomedical and Consumer Electronics Applications Lecture 1: Introduction to MEMS and Microsystems 1 What is MEMS/Microsystems? MEMS: MicroElectroMechanical System 1.  Devices and systems that perform electrical/electronic and mechanical functions with components of micrometers size (~1 µm to ~1000 µm) 2.  Unique machining and manufacturing approach (micromachining) ü ~60 years history ü Broad applications, rapid growth, high investment ü Miniaturiza