加速度计设计.docxVIP

Design of a Micromachined AccelerometerCAO Zhuo (zc2e09@ecs.soton.ac.uk)PART1: Theoretical backgroundMicromachined AccelerometersMechanismPiezoresistiveCapacitivePrincipleThe suspension beams are fabricated by piezorisistive material. When the proof mass moves relative to the fixed frame, the deformation in the suspension beams will generate stress profile, hence change the resistivity of the embedded piezoresistors. When external acceleration applied on the capacitive accelerometer, the relative displacement between the proof mass and the fixed conductive electrode frame will change, hence changing the capacitance.Advantagessimply structure and readout circuitThey have high acceleration sensitivity, low temperature sensitivity, good noise performance and low power consumption.Drawbacksrelatively large temperature sensitivity and small output signalMust be properly packaged because of their high sensitivity to the electromagnetic interference (EMI).MechanismTunnellingResonantThermalPrincipleUsing a constant tunnelling current between one tunnelling tip (attached to a movable microstructure) and its counterelectrode to sense displacement.transferring the proof-mass inertial force to axial force on the resonant beams and hence shifting their frequencyThe temperature flux from a heater to a heat-sink plate is inversely proportional to their separation. The change in separation between the plates can be measured by thermopiles.AdvantagesVery high resolution and sensitivitydirect digital outputApplied in the environment with large temperature gradientDrawbacksHigh supply voltage is requiredNot clearNot clearTable.1 the main accelerometer mechanism and their characteristicAlthough several types of MEMS accelerometers have been reported in the literature, the basic structure consists of a proof mass that is attached by a mechanical suspension system to a fixed frame. Theoretically, the mechanical transfer function of this system in Laplace domain is:In this equation, M ref