材料物理导论 Chapter 101 Thin film and some functional materials.pptVIP

Pressure Pressure Units Vacuum Pumps Transfer Pumps ? Atmospheric Pressure CVD (APCVD) ? Low Pressure CVD (LPCVD ) ? Metal-Organic CVD (MOCVD) ? Plasma Enhanced CVD (PECVD) ? Laser-Assisted CVD (LACVD ) Chemcal Vapor Deposition (CVD) Schematic of CVD (1) Transport of the precursors from the chamber inlet to the proximity of the wafer, (2) reaction of these gasses to form a range of daughter molecules, (3) transport of these reactants to the surface of the wafer, (4) surface reactions to release the silicon, (5) desorption of the gaseous by-products from the reactor. ? Cold wafer: reaction-cont