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- 2017-12-13 发布于浙江
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Chapter 2
Transmission Electron Microscope
(TEM)
Structure of TEM
(1) illumination system
Electron
optics system (2) imaging system
(3) image viewing and
recording system
TEM
Vacuum
system
Power Supply
and control
system
Illumination
system
Imaging system
Image
viewing and
recording
2.1 The illumination system (照明系统)
consists of
– electron gun
(电子枪)
provides electron
source
– condenser lenses
(会聚镜)
controls the
electron beam
2.1.1 Electron gun
• provides source of electrons to illuminate
the specimen.
• There are two kinds of electron sources:
– thermionic source
– field-emission gun (FEG) 场发射枪
Thermionic Emission
• Mechanism: If any
material to be heated to a W filament
high enough temperature,
the electrons gains
sufficient energy to
overcome the natural
barrier (work function)
that prevents them from
leaking out to escape
from the source.
• Two thermionic sources
used in practice are LaB6 crystal
tungsten filament (钨灯
丝) and LaB6 crystal (六
硼化镧).
Thermionic gun
A high voltage is placed
between the filament
(acting as a cathode)
and the anode, modified
by a potential on the
Wehnelt which acts to
focus the electrons into
a crossover, with
diameter d and
0
convergence/dive
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