电子显微分析（章晓中）教学课件chapter4.pdfVIP

实验一样品制备 分组和时间安排 组号 学号 日期 时间 1 2010011904 －2010011914 10月24 日 1:30－2:30pm 2 2010011915 －2010011928 10月24 日 2:30 －3:30pm 3 2010011930 －2010011941 10月24 日 3:30 －4:30pm 4 2010011942 －2010011952 10月24 日 4:30 －5:30pm 5 2010011953 －2010011964 10月24 日 5:30－6:30pm 6 2010011966 －2010011978 10月25 日 3:30 －4:30pm 7 2010011979 －2010011989 10月25 日 4:30 －5:30pm 8 王聪，徐贤铤，孙骁航，金祖鑫， 10月25 日 5:30－6:30pm 陈曦，朴栽亨，郑善基，郑丞真， 朴真实，傅伟 实验课在东主楼11区电镜中心一楼“样品制备室”(11-127)做，实验课 要签到，未参加者没有实验课分数。与其他课有冲突的同学可与其他组 同学交换时间（要保证每组不多于11人）. Cross section (截面/界面）specimens • Used for interface/surface study • most widely used cross section sample are thin films and semiconductor devices (which are often multilayer materials and therefore have multiple interfaces). cross section specimen 1. Rather than trying to thin one interface only, the sample can be cut and glued （粘）together （face to face) to produce several layers. cross section specimen 2. A critical step is the gluing of the sections to form the sandwich the thickness of the epoxy （胶水）layer must be such that it is thick enough for good adhesion （结 合）, but not so thick that it is completely thinned away during final ion milling 3. Then cut the glued sections into 3-mm rods using an ultrasonic drill. Alternatively, cut the samples smaller and encase (嵌) them in a 3-mm thin-walled tube. Section the tube into disk. 4. Thin it as you do in making thin foil (by use of ion milling) Ultramicrotome (超薄切片机） • The ultramicrotome are routine