电子显微分析（章晓中）教学课件chapter5.pdfVIP

Chapter 3 Electron Diffraction ( 电子衍射） 3.1 Interaction of electron with atom The electron is a low mass, negatively charged particle. It can easily be deflected by passing close to other electrons or the positive nucleus of an atom. These Coulombic (electrostatic) interactions cause the electron scattering （散射） which is the process that makes TEM feasible. Elastic scattering and inelastic scattering • Elastic scattering （弹性散射） – electron changes only direction but not energy – Electron diffraction and TEM imaging mainly involve elastic scattered electrons • Inelastic scattering （非弹性散射） – electron changes both direction and energy – SEM，EDS and EELS involve inelastic scattered electrons Elastic scattering （弹性散射） • Elastically scattered electrons are the major source of contrast （衬度）in TEM images and they also create the intensity distributions in diffraction patterns. • Elastic scattering usually occurs at relatively low angles (1- 10 ) High-energy electron is scattered by an isolated atom • The electron may interact with the electron cloud, resulting in a small angular o o deviation  (1 - 10 ). • If an electron penetrates （穿 过）the electron cloud and approaches the nucleus, it will be strongly attracted and may be scattered through a larger angle that in rare cases in the TEM can approach o 180 (back scattering). atomic scattering factorf( ) ( 原子散射因子） f( ) is a measure of the amplitude （振幅） of an electron wave scattered from an isolated atom 2 2 me      