实验室科研探究（清华大学）8气体放电中的光谱测量.pdfVIP

Plasma Spectroscopy (Spectroscopic Study of Gas Discharges) Yi-Kang Pu Department of Engineering Physics Spring 2007 Outline • What is a plasma? • Plasma applications and why do we study plasmas? • Origin of light emission (the teacher will ask you several questions regarding light emission!) • What can optical emission spectroscopy tell us? The birth of quantum mechanics! • What is a spectrometer? • Recent research results using OES in plasmas What Is Plasma •A plasma is a ionized gas with equal numbers of positive and negative charges. •A more precise definition: a plasma is a quasi-neutral gas of charged and neutral particles which exhibits collective behavior . • Examples: Sun, flame, neon light, etc. Ionization • Electron collides with neutral atom or molecule • Knock out one of orbital electron e + A A+ + 2 e • Ionization collisions generate electrons and ions • It sustains the stable plasma Excitation-Relaxation e + A A* + e A* A + hν(Photos) • Different atoms or molecules have difference frequencies, that is why different gases have different glow colors. • The change of the glow colors is used for etch and chamber clean process endpoint. Excitation Collision Impact Grounded Excited electron electron electron Impact electron Nucleus Nucleus Relaxation h: Planck Constant