一种新型微机械谐振式压力传感器研究传感技术学报.pdfVIP

第 22 卷 　第 6 期 传 感 技 术 学 报 Vol . 22 　N o . 6 2009 年 6 月 CHIN ES E J OU RNAL O F S EN SORS AND AC TUA TORS J u n . 2009 Research of a Novel Micromachined Resonant Pressure Sensor S H I X i aoj i ng , C H E N D ey ong , WA N G J u nbo , W U Z heng w ei , L I U L ei ( ) S t ate Key L aboratory of T rans d ucer Technology , I ns t it ute of E lect ronics , Chi nese A ca demy of S ciences , B eij i ng 100 190 , Chi na Abstract :A novel re sonant p re ssure sen sor st r uct ure i s p ropo sed . Elect ro magnetic excit ation and diff erenti μ ( ) al det ection are adop t ed . 30 m diff u sed 100 silicon i s u sed for t he re sonator ,t hu s t he re sonator an d t he p re ssure diap hragm can be f abricat ed on t he same silicon sub st rat e wit hout bo ndin g , w hich can avoid t he st re ss f ro m t he bon ding p roce ss. The t heoretical analy si s ,F EAan sy s simulation , f abrication p roce ss , and t he t e stin g exp eriment s are de scribed . In t he f ull scale 0～100 k Pa , t he exp eriment s re sult s show t hat t he qualit y factor (Q) i s bet t er t han 10 000 in low vacuum , t he re solution i s 1/ 10 000 , t he nonlinearit y i s 0 . 62 % , an d t he diff erential sen sitivit y i s 200 Hz / k Pa . Key words :re sonant p re ssure sen sor ; M EM S ; elect ro magnetic excit ed ; differential det ection ; F EAAN SYS EEACC :7230 ; 7320 E 一种新型微机械谐振式压力传感器研究 史晓晶 ,陈德勇 ,王军波 ,毋正伟 ,刘 　磊 ( 中