T2铜箔精密微冲孔工艺.PDFVIP

第 8卷 第 3期 纳 米 技 术 与 精 密 工 程 V0l_8 No．3 2010年5月 NanotechnologyandPrecisionEngineering Mav 2010 PrecisionM icro-PunchingProcessofT2CopperFoil XUJie一，GUOBin一，SHANDe—bin一，WANGChun—ju一，LIMing—xing (1．SchoolofMaterialsScienceandEngineering，HarbinInstituteofTechnology，Harbin150001，China； 2．KeyLaboratoryofMicro—SystemsandMicro—StructuresManufacturingofMinistryofEducation， HarbinInstituteofTechnoloyg，Harbin150080，China) Abstract：Withthedevelopmentofmicro—electro—mechanicalsystem (MEMS)，themicro—holesare widelyusedinthefieldsofbiomedicalmedicaltreatment，micro—electronic，textiledyeingdeviceswith highprecision，goodqualityofshearededgeanddimensionstability，whichcansatisfytheindustrialde- mandsoflow costandmassproduction．Micro—punchinghasadvantagesofthetraditionalplasticforming techniquein high massproduction，simpleprocessing，fineproperty andhigh dimensionalprecision， whichisverysuitableformassproductionofmicro—pans．Themicro—punchingdiesweredesignedandthe punchingprocessesofmicro·holeswerestudiedindifferentblankingconditions．Theresultsshow thatthe processofmicro—-punchingissimilarto theconventionalpunchingandtheprocessofmicro—-punchingis composedofelasticdeformation stage，plasticshearingstage，fractureand separationstage．Moreover， theshearededgeisstillcomposedofrolloverzone，shearingzone，fracturezoneandbur．Inthepunching process，themaximum sheafingstrengthfirstlydecreasesandthenincreaseswiththeincreaseoftherela— tiveblankingclearance．Themaximum blankingforceandsheafingstrengthdecreasewiththeincreaseof theblankingvelocity．Moreover，thedepthofthesheafingzoneincreasesandthequalityofcrosssectionis improved．Intheend，themicro—holeof0．4mm indiameterwasmanufacturedwithgoodqualityinthe0p— timum blankingconditionofrelativeblankingc