基于随机共振的纳米碳管气体传感器的研讨.pdfVIP

第19卷第5期 传感技术学报 V01．19No．5 CHINESE OFSENSORSANDACIVATORS 2006年10月 JOURNAL 0ct．2006 ofCarbonNanotubesGasSensorBasedonStochasticResonance Study 2 WULi—lil，HⅥGuo-hual，PANMinl，CHENXiao—bin Yu—quan¨，ZHANG Biomedical andInstrument ，1．Collegeof Engineering Science，劢ejiangUniversity，Hangzhou310027，China；、 Science 310027，China ＼2．CollegeofMaterials ／ Abstract：Anovelionizationsensorbasedoncorona carbon gas dischargeusing pro— sensorutilized structureandthefieldemissioneffectofCNTs．Dueto unique adopting posed．The physical themethodofanodicaluminum to CNTs，theelectrodeandCNTs oxide(AAO)templategrow aligned were the sensor itsstructureand technics．AscontrolledDCvolt— integrated，SOgas simplified processing itwas was tOtheCNTselectrode，theofCNTs electricfields，SO age applied sharptips generatedhigh to corona atlow differenthavetheir breakdown easyproducedischargevoltages．Asgases unique voltage is to one or mixture ordertO the and current，it certain discharge possibleidentifygas gases．In improve ofthe deviceof stochasticresonancewasusedinthe circuit sensor，the