卷绕式真空镀膜机真空泵结构设计.docVIP

摘 要 针对设计要求，对罗茨真空泵进行了设计。主要包括传动系统的设计。 关键词：真空；；Abstract Vacuum pumps with mechanical，physical，chemical，physical and chemical methods such as container extraction in order to obtain and maintain a vacuum device . Vacuum pumps and other equipment (such as vacuum container，vacuum valves，vacuum gauges， connecting pipes，etc.) consisting of a vacuum system，widely used in electronics，metallurgy， chemical，food，machinery，pharmaceuticals，aerospace and other sectors. Press the pump works，essentially trapping gases into the gas pump and pump types . Pump include : liquid ring vacuum pumps，reciprocating pumps，rotary vane vacuum pumps，vacuum pump stators，piston pumps，trochoid pump，dry vacuum pumps，vacuum pumps，molecular pumps，traction pumps，composite pumps， water jet pump gas jet pumps，steam jet pumps，diffusion pumps. Trapped gas pump comprising: a sorption pump and a cryopump . For the design requirements，the Roots vacuum pump design . Including the transmission system designs. Roots vacuum pump works with the Roots blower similar. Due to the continuous rotation of the rotor，gas is drawn from the intake port into the space between the rotor and the casing，and then discharged through the exhaust port. Because the space is closed suction state，so there is no gas in the pump chamber compression and expansion . However，when the top edge of the exhaust port of the rotor rotated，the space communicates with the exhaust side，the higher the exhaust -side gas pressure，a portion of the washed gas back to the space，the gas pressure is abruptly increased. As the rotor continues to rotate，the gas discharge pump . Key Words: Vacuum; Vacuum pump; Structure design 目 录 要 I Abstract II 目 录 III 第1章 绪论 1 1.1真空镀膜机的概述 1 1.2 真空泵的应用现状及发展趋势 3 1.3课题设计内容 12 第2章 真空泵总体方案设计 13 2.1设计真空泵的技术要求 13 2.2真空泵总体构成 14 2.3真空泵结构概述 16 2.4本次设计真空泵结构特点 16 2.5真空泵防止过载可采取的措施 17 第3章 真空泵结构设计与计算 18 3.1电机的选择 18 3.2总体传动结构设计 19 3.3斜齿圆柱齿轮传动设计 20 3.4转子体设计计算 23 3.5轴的结构设计计算 27 3.6轴承选取设计计算 31 第4章 结论 35 参考文献 36 致 谢 38 绪论 真空真空镀膜机主要指