真空精密工作台结构设计.doc

本科学生毕业论文 真空精密工作台结构设计 系部名称： 机电工程学院 专业班级：机械设计自造及其自动化07-9班 学生姓名： 指导教师： 陈佳莹 职 称： 讲 师 黑 龙 江 工 程 学 院 二○一一年六月  The Graduation Thesis for Bachelors Degree The Structure Design of Vacuum Precision Worktable Candidate：Ge Lipeng Specialty：Mechanical Design and Manufucture Atuomation Class：07—09 Supervisor： Heilongjiang Institute of Technology 2011-06·Harbin  摘 要 光刻机工作时所要达到得很高的精度，对机械系统的传动机构和导轨都有很高的要求，因此，一般的滑动导轨的丝杠都不能满足这些要求。基于此，本课题采用了具有高精度，高平稳性的空气轴承来代替传统的导轨，传动件则采用精度很高的滚珠丝杠，以滚动代替普通丝杠滑动来提高精度，从而保证光刻机的加工精度。兼之电子束正常工作时的高真空度给抽真空和密封上带来的高难要求，本课题在设计中力求减少真空体积，并采用蛇皮管提出解决方案。本课题主要解决了以上问题，故本文主要以总体设计，滚珠丝杠，空气轴承三部分来介绍。 本系统结构简单合理，运行可靠，操作简易完全，无污染，易于使用。 关键词：导轨；空气轴承；滚珠丝杠；真空；  ABSTRACT Because the high precision that photoetching machine must achieve when working poses a high standard for the gearing and guide of mechanical system, neither ordinary sliding guide nor guide screw is able to meet these demands. Therefore, in this subject, the author adopts air bearing with high precision and stability to replace the traditional guide and uses hall guide screw as transmission part which is rolling instead of sliding generally adopted by ordinary guide screw to improve precision, thus guarantees the processing precision of photoetching machine. Meanwhile,the high vacuum degree demanded by electron beam to work normally brings many difficulties tovacuum pump and sealing. The author strives to decrease vacuum volume when designing the subject and adopts flexible conduit to propose a solution. This paper is just to solve the above-mentioned problems and is introduced as follows general design, ball guide screw and air bearing. This system has a simple and reasonable structure, reliable function, easy and complete operation and no pollution, thus, it is easy to adopt this system. Key words: Guide; Air Bearing ;Ball Guide Screw; Vacuum;  目 录 摘要······························································Ⅰ Abstract···