光罩-国立彰化师范大学.ppt

* * * * * * * * * * * * * * * * * * * Content 1. 半導體元件簡介 2. 晶圓製作流程 3. Lithography概論 4. Etch概論 5. CVD / PVD 概論 課程材料及參考文件 * Major contents are revised from “Introduction to Semiconductor Manufacturing Technology” by Hong Xiao, Ph. D. * STIP 科技產業資訊室 .tw/ * Silicon Technology and Manufacturing, Technology Research at Intel /technology/silicon/index.htm Bipolar Transistor Layout MOSFET結構 Leff = Ldrawn－2LD Leff 為等效長度，Ldrawn 為全長，LD 為擴散長度。 對於源極和汲極來說，結構是對稱的。 基板連接 MOSFET為一個四端元件，一般NMOS電晶體基板連接至系統中最小的供應電壓，通常實際的連接是透過一電阻 p+ 區域提供。 MOEMS Technology MEMS Overview MEMS Sensors in NCUE SOC of DMD / DMD pixels with particle defects MEMS Microphone Under Development Fluidlenses 液體透鏡 Temperature Compensation Analysis of Liquid Lens for Variable-Focus Control, Shu-Jung Chen and Chih-Hsiung Shen, Proc. SPIE Photonic West 2006. (EI) 光學模擬與公差分析於非球面廣角鏡頭之比較研究, 黃柏涵、沈志雄,第二十二屆中國機械工程學會(2005) What’s the next ? IBM 256 Mb DRAM Nano CMOS CCD Microlenses Circuit Structure CCD Structure /primer/java/digitalimaging/ccd/virtual2/index.html Charge Couple Device Recently, transparency of the channels has been increased with substantial improvement in blue-green sensitivity of some scientific-grade CCDs (Blue Plus curve in Figure 1) through the use of pioneering gate materials and proprietary phosphor coatings. Coatings of this type (Lumogen) are deposited directly onto the array surface and emit light in the 500 to 580 nanometer region when excited by short wavelength (120 to 450 nanometer) high-energy ultraviolet and visible light. Phosphors embedded within the coating produce a secondary fluorescence that is emitted in all directions, with only those photons entering the array being absorbed to yield a quantum efficiency of approximately 15 to 20 percent. The coatings are transparent to visible light, so they do not affect photon absorption at wavelengths exceeding 450 nanometers, producing an apparent spectral response range of almost 1000 nanometers (120 to 1100 nanometers). CCD C