空调排气热回收实验半导体车间热回收型洁净空调系统.docx

中文4564字出处：第七届亚洲气溶胶会议论文集. 2011附录英文文献翻译An Experiment on Energy Reduction of an Exhaust Air Heat Recovery Type Outdoor Air Conditioning System for Semiconductor Manufacturing Clean RoomsKyung-Hoon Yoo 1 , Gen-Soo Song 1 , Hyung-Tae Kim 1 , Seung-Woo Son 2 and Dug-Jun Park 31 Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH), 1271-18, Sa-1-dong, Ansan-si, 426-171, Gyeonggi-do, South Korea2 Sunglim PS Co., 1301, Namseong Plaza, 345-30, Gasan-dong, Geumcheon-gu, Seoul, 153-8023 Shinsung ENG Co., 404-1, Baekhyeon-dong, Bundang-gu, Seongnam-si, 463-420ABSTRACTIn recent semiconductor manufacturing clean rooms, the energy consumption of an outdoor air conditioning system represents about 45 % of the total air conditioning load required to maintain a clean room environment. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery from the exhaust air is therefore usefulfor reducing the outdoor air conditioning load for a clean room. In the present work, an energy-efficient outdoor air conditioning system was proposed to reduce the outdoor air conditioning load by utilizing an air washer to recover heat from the exhaust air. The proposed outdoor air conditioning system consisted mainly of a pre-heater, an air washer, two stage cooling coils, a reheating coil, a humidifier and two heat recovery cooling coils inserted into the air washer and connected to a wet scrubber. It was shown from the lab-scale experiment with outdoor air flow of 1,000 m3/h that the proposed system was more energy-efficient for the summer and winter operations than an outdoor air conditioning system with a simple air washer.KEYWORDS:Semiconductor Manufacturing Clean Room, Outdoor Air Conditioning System, Air Washer,Heat Recovery, Energy Reduction.IntroductionFor recent semiconductor manufacturing clean rooms, the energy consumption of an outdoor airconditioning (hereafter OAC) system represents a