以摩擦力显微术研究硬膜材料奈米磨润特性-Core.PDFVIP

以摩擦力顯微術研究硬膜材料奈米磨 潤特性 Study of Nanotribological Properties of Hard Coating Materials by Friction Force Microscopy 林欣瑜、陳右儒、谷祖賢、林鶴南、方友清、童山 Hsin-Yu Lin, Yu-Ju Chen, Tsu-Hsien Ku, Heh-Nan Lin, Yu-Ching Fang, Shan Torng 目前硬膜材料的厚度已小於100 奈米，因此奈米尺度的磨潤特性在近年來受到極大重視。為 了分析硬膜的均勻性及磨潤特性，具有奈米解析度的定量摩擦力測量技術便極為所需，而具 有摩擦力測量功能的原子力顯微術，或稱為摩擦力顯微術，便符合此項需求。本文介紹定量 摩擦力測量技術，並測量矽探針與氮化鈦及類鑽碳兩種硬膜的摩擦係數。此外也以探針在樣 品表面上來回掃描數十至上百次，造成表面磨耗，然後比較表面形貌改變，藉此了解硬膜的 奈米磨潤特性。 The nanotribological properties of hard coating materials have received great interest in recent years due to the use of film thickness below 100 nm. A quantitative friction measurement technique with nanoscale resolution is highly desirable for the evaluation of film homogeneity and tribological properties. For this purpose, atomic force microscopy with friction measurement, which is also called friction force microscopy, is well-suited for nanotribological research. In this paper, a quantitative friction measurement technique is introduced. The friction coefficients between a silicon tip and titanium nitride and diamond-like-carbon films have been obtained. In addition, a repeated scanning on a specific surface region up to several tens or hundreds of times can cause surface wear. By comparing the surface morphologies before and after the repeated scanning, the nanotribological properties of the two films have been evaluated. 一、前言 下的磨潤特性在近年來受到極大重視。為了分析及 製程控制薄膜的均勻性及磨潤特性，具有奈米解析 硬膜材料目前已被廣泛應用於機械加工器具或 度的定量摩擦力測量技術便極為所需(1,2) 。 微小元件表面，用以降低表面摩擦、減損磨耗及抵 在摩擦力研究的發展歷史上(1)