常压下使用等离子方式分解PFC气体的研究-中国测试.PDFVIP

第41卷第3期 中国测试 Vol.41 No.3 2015年3月 CHINA MEASUREMENT TEST March，2015 doi院10.11857/j.issn.1674-5124.2015.03.015 常压下使用等离子方式分解PFC气体的研究 张晨阳袁 王晓东 （天津商业大学机械工程学院，天津 300134） 摘 要院针对半导体产业中PFC系列的温室气体在其排放前必须进行无害化处理的情况，开发一种常压下用等离子 分解处理有害气体的装置，其构造为在一个直立的二重管中使水幕沿管内壁流下，在此水幕围成的空间中发生等离 子电弧并通过被处理气体，使气体分解并马上溶入水中。实验中达成300mm长的等离子电弧，在气体排放量与实际 生产条件相同的情况下，分解率高达99%。 ； 关键词院等离子 PFC；分解；半导体 文献标志码院A 文章编号院1674-5124渊2015冤03-0065-04 Study on decomposing PFC gas using plasma at atmospheric pressure ZHANG Chenyang，WANG Xiaodong （School of Mechanical Engineering，Tianjin University of Commerce，Tianjin 300134，China） Abstract: Perfluorocompounds （PFC）were used extensively in the semiconductor industry. The PFC must be decomposed to reduce its harmfulness to the environment before it was discharged. A new device was developed to decompose the PFC using plasma at atmospheric pressure. A water veil was formed by falling water along the inner wall of the standing glass tube. The plasma arc was generated in the space which was surrounded by the water veil. The PFC was immediately dissolved in the water when it passed the space. The plasma arc is 300mm in length，and the decomposing rate was up to 99% when the discharged gas amount was the same as that in the practical condition. Keywords: plasma；PFC；dissolve；semiconductor 。所以， 0 引 言 效果，对地球温暖化产生长期深刻的影响 FPC