Principles of Plasma Discharges and Materials Processing第13章.pdfVIP

CHAPTER 13 WAVE-HEATED DISCHARGES Waves generated near a plasma surface can propagate into the plasma or along the surface where they can be subsequently absorbed, leading to heating of plasma elec- trons and excitation of a discharge. For electron cyclotron resonance (ECR) dis- charges, described in Section 13.1, a right circularly polarized wave propagates along the dc magnetic field lines to a resonance zone, where the wave energy is absorbed by a collisionless heating mechanism. ECR discharges are generally excited at microwave frequencies (e.g., 2450 MHz), and the wave absorption requires application of a strong dc magnetic field (875 G at resonance). The aspect ratio of these discharges, l=R for a plasma cylinder, can range from l=R 1 to l=R 1. For helicon discharges, described in Section 13.2, a whistler wave launched by an antenna propagates along a plasma column and is subsequently absorbed by a collisional or collisionless mechanism, resulting in heating of the bulk plasma electrons. Helicon discharges are usually excited at rf frequencies (e.g., 13.56 MHz), and a magnetic field of order 100 G or greater is required for wave propagation and absorption. The aspect ratio ranges from l=R 1 to l=R 1. For surface wave discharges, described in Section 13.3, a wave launched along the surface of the plasma propagates and is absorbed by collisional heating of the plasma electrons near the surface. The heated electrons subsequently diffuse into the bulk plasma. Surface wave discharges can be excited by either rf or microwave sources and do not require dc magnetic fields, but generally a long propagation distance is needed for efficient wave absorption, leading to discharges with high aspect ratios, l=R 1. In contrast to capacitive rf