三自由度超精密量测探头与三轴向光学式加速度计之研制-南台科技大学.PDF

行 度精量度 Development of a 3-DOF Ultra Precision Measurement Probe and Triaxial Optical Accelerometer NSC 94-2212-E-218-010 行94 年08 01 95 年07 31 良 參林李 pick-up head of a commercially available DVD. 靈 度 The accelerometer detects the focus error signal (FES) generated by a moving object via a 度度 built-in four-quadrant photodiode. The linear (DVD-ROM)讀 路 range of the FES curve is employed to indicate 量理 量 the displacement of the seismic mass relative to 不讀 the base of the accelerometer. The acceleration 量 S利 S acting on the base is then determined on the 錄量 basis of the displacement. The experimental 離 度 results reveal that the noise equivalent 度 acceleration (NEA) is less than 30 µg/√Hz. 度 30µg/√Hz This study used the pick-up head from the commercial DVD-ROM as the basis for optical 度 量 path, and drilled a 2mm hole on the focusing DVD 2mm object lens. After combined with the design of a 兩 DVD beams plitter, the laser beam source of the two 兩 DVD formed t