万级净房设计及概念.pptVIP

CLASS 10K CLEAN ROOM DESIGN This is the class 10K clean room design which I had completed for our Wafer Probe. We just do some modification to existingclass 60K system to meet the Wafer Probe class 10K requirement. Actual reading taken was below 1K since we commission the system.(A) The dust control in the production floor will depend on the following :1) Nos of air change. (This will help to filter off the airborn dust particles in the air)2) Efficiency of the air filter. ( Select the right filters to do the right job.)3) Avoid stagnant flow area.? (To avoid dust particle accumulate in one particular area)4) Supply Laminar air flow. (To allow dust to settle on the floor and clean by House keeping thus prolong the service life span of the filter)5) The return grill must be located in the B/E if B/E and F/E are together. (To ensure the recirculated air flow direction is flow from clean area to dirty area)6) Good house keeping. (To get rid of settled dust)7) Air shower for entrance. ( To reduce dust carry by people into the production floor)8) Maintain positive static room pressure to outside.? (Prevent external dust to penetrate into production floor)9) All gap in the filters must be sealed. (To achieve proper filtration of dust)10) Good exhaust system for process that generate dust. (To avoid overloading of the AHU filtration system)11) Avoid storing of dust generated material (eg.cardboad) in production floor. ? (To reduce the dust particles in the production floor)12) All make up air must be filtered before going into the AHU.? (To avoid overloading of the AHU filtration system) CLASS 10K CLEAN ROOM DESIGN (B) The RH/Temp control will depend on the following :????? --------------------------------------------------1) Maintain positive static room pressure to outside. (Prevent external moist air to penetrate into production floor)2) Correct chilled water temp in the AHU. (To make sure the moisture in the recirculated air can be co