微镜阵列器件.pptVIP

Digital Micromirror Device Begon Martin Ciapala Richard Deaki Zoltan What is a DMD ? Matrix of micromirrors 1024 x 768 mirrors for example Size of the mirrors: 16 x 16 um What is a DMD ? What is a DMD ? Applications Mainly projection systems (Digital Light Processing) Other emerging applications such as 3D metrology, confocal microscopy,digital TV Hinge fatigue Fatigue: slow growth of a crack driven by repeated plastic deformation Mirror in normal operating mode switches every 200 microseconds 5 years use with 1000 operating hours a year ? mirrors switch 90x109 times Hinge fatigue First approach: anaylsis using bulk properties of the hinge material ? showed that fatigue would be a big problem However… accelerated tests proved that wrong, samples easily exceeding 100x109 switches showing no fatigue. Explanation: hinge so thin ? governed by thin film properties! Hinge memory Most significant mode of failure Occurs when a mirror operates in the same direction for a long period of time Main factors are the duty cycle and the operating temperature Duty cycle: percentage of time a mirror is addressed to one side.(95/5) Temperature is the dominant factor for hinge memory lifetime Hinge memory Life test under standard condition of 65°C and 5/95 duty cycle Bias voltage has to be increased to annihilate residual tilt angle. Hinge memory Cause: Metal creep of the hinge material Thermal management of the DMD Several sources of heat contribute to hinge memory: Radiant energy from the light source Equipment composing the DLP projector and surrounding the DMD Efficient heat management added to the previously cited improvements can ensure a lifetime greater than 40000 hours. Stiction Induced by an excessive adhesive force between the landing tip and its landing site Adhesive forces can be induced by: Surface contamination Capillary condensation CMOS defects Van der Walls forces Stiction Reliability testing can be done to measure the distrib