2μm锑化物分布反馈半导体激光器的光栅制备与研究 word格式.docxVIP

摘要2~5μm红外波段拥有两个“大气窗口”，分别为2~2.5μm波段与3.5~5μm波段。在此波段内的激光由于具有较低的散射与吸收，因而在空间点对点通信、空间探测等方面拥有重要的应用前景。与此同时光纤通信系统的发展迅速，导致了对高速、远距离的光通信光源要求越来越高。分布反馈激光器(DFB-LD)成为了高边模抑制比的首选光源。而锑化物半导体激光器激射波长可在1.7μm~4.5μm 范围内调节。因而，锑化物材料是研制中红外激光器的不可或缺的选择。本文通过对2μm锑化物DFB-LD工作理论的分析和内部结构模拟设计，得出适合2μm锑化物DFB-LD的布拉格光栅的阶数、光栅的周期、光栅的深度、占空比等各项参数，并对锑化物的湿法腐蚀的机理进行分析实验，最后通过全息光刻方法湿法腐蚀制作出二阶布拉格光栅。制作出2μm锑化物DFB-LD工作的布拉格光栅并对制备出的布拉格光栅通过扫描电子显微镜（Scanning Electron Microscope）和原子力显微镜（Atomic Force Microscope）对光栅的周期、占空比、深度及表面形貌进行了表征，表征出的制作的二阶布拉格光栅，光栅周期为528nm、占空比为0.25、光栅深度为109nm 适合、光栅的表面形貌平整均匀，光栅形状为理想的正弦型光栅。具有完美的表面形貌，表明所制备的光栅能够满足二次外延生长和2μm锑化物DFB 半导体激光器对二级布拉格光栅的要求，这说明可以对锑化物分布反馈半导体激光器二次外延制作内置布拉格光栅起到指导性的作用。关键词：锑化物DFB-LD布拉格光栅湿法腐蚀全息光刻ABSTRACTInthewavebandof2~5μm,therearetwoparticular“antmosphericwindow”, whichlocatedin2~2.5μmand3.5~5μm.Laserinthosetwoparticularbandpossess thepropertyoflowerscatteringandabsorbability,whichmakeit’sapplication prospectinareaslikeSpatialpointtopointcommunication,ladarortheindicationof militarytargeyquietpromising.Duetothegrantdevelopmentinfiber communications, seminconducter lazar (withtinnerlinning borad)has becomemajor deviceinhigh-speed,long-distancecommunicationsandcoherentcommunication, whichmakesDFB-LDbecomeprimarylightsource.Sinceantimonidesemiconductor laser’smaserwavelengthcanbeadjustablebetween1.7μm~4.5μm,antimonide marterialhasbecomethefirstchoiceincraftingthemidinfraredsemiconductorlasers.Sothispaperfocusontheoreticallyanaylsisof2μmantimonideDFB-LDandthe designaimtobetterlaserstructure.Whichlettofinerdesignincycle,series,depth anddutycycleofthebuilt-inBragggratingandthentheanalyticalexperimentofthe macheanismofboththeantimonidedryetchingandwetetchingfinallydryetchthe 2μmDFB-LD built-in Bragg grating though holographiclithographically.Withbuilt-inBragggratingrating2,ratingcycle528nm,dutycycle0.25,depth 109nm,the2μmDFB-LDshowsuniformityandclosetorectangulargrating.And thoughtestinggrating’scycle,depth,dutycycleandsurfacetopographybySEMand AFM,thegraphicshowsaidealsinusoidwithperfectsurfacetop