热超声键合高频换能系统设计与控制-机械工程;机械制造及其自动化专业论文 word格式.docx

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2018-04-24 发布于上海
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热超声键合高频换能系统设计与控制-机械工程;机械制造及其自动化专业论文 word格式.docx

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热超声键合高频换能系统设计与控制-机械工程;机械制造及其自动化专业论文 word格式

ABSTRACTThepiezoelectrictransduceranditsdrivingsystemareoneofthekeycomponentsofhighfrequencythermosonicbondingequipments,andtheresearchonitsstructureanddrivingcontrolmethodologyhasimportantacademicandapplicationvalues.To improvetheefficiencyandqualityofthermosonicICbonding,this dissertation studiesonthedynamicdesigntheoryofflexibleconnectionstructureforhighfrequencyultrasonictransducer,excitingsignalsourceofthepowerultrasound,dynamictuningofcontrolstrategiesandbondingtemperature.Thefollowingcontributionshavebeenachieved:Theflexibleconnectionstructureofhigh-frequencyultrasonictransducerfor thermosonicwirebondingisproposedbasedontheelectromechanicalequivalenttheory,finiteelementanalysis(FEA)andmodulardesignconcept.Thustheinfluenceoftheinflexiblejointontheenergydistributionoflongitudinalvibrationcanbereducedandthemodalconcentrationproblemofhigh-frequencytransducerissolved. A125kHzultrasonictransducerhasbeendesigned,whoseenergytransmissionlawandresonancecharacteristichavebeeninvestigated.Theadmittancemodelofequivalentcircuitadjacenttotheresonantfrequencyof theultrasonictransducerisestablished,anditisconcludedthatthestaticcategoryand thedynamicresistancearethemajorinfluencefactorsforelectricsmatchingandresonantfeatureoftheultrasonictransduceranditisnotnecessaryforthehigh-frequencyultrasonictransducertodesignmatchingcircuitwhenthetransducerpossessesminorstaticcapacitance.Boththeoryandregulationofthedynamictuningforhigh-frequencyultrasonictransducerbasedoncurrentandimpedancephasefeedbacktechnologyarepresented.Thetechnologies,includingthedirectdigitalsynthesistechnology,detectingmethodofthecurrentrealeffectivevalueandsignalphaseinRFfield,precisemeasurementtechniqueofthetemperatureandvirtualinstrumenttechnology,areimportedintothe drivingsystemdesignof thehigh-frequency thermosonictransducer. AnembeddedsystembasedonhighspeedAVRmicroprocessorisdeveloped.Experimentaltestresultsofthedrivingsystemshow thehighqualitypowerultrasonicsignalgeneration,quickmeasurementforrealeffectivev