母盘生产制成工艺简介.pptVIP

* * Push Pull 推挽的定义 PP----径向跟踪信号,它测量驱动器保持轨道跟踪能力的难易程度。 PP----是以开环方式测量的。 CD子盘标准： 0.04 to 0.07 * * Push Pull 推挽的表征 * * Push Pull的测量 Push Pull 体现的 是当读取光距离数 据轨0.1um时的接 受器信号差（IA-IB）。 宽大的pits（数 据坑）测量到的PP 值相应会高。 * * 影响Push Pull的相关因数 坑道宽度 – 坑道越宽，PP越高。也就是说刻录光斑越大,PP值越高。 如果 Symmetry 太高(正)，则PP值会降。 涂胶厚度 – 涂胶厚度越厚，则PP 越低。 PP 同 HF 在一定范围内(实际生产范围)是翘翘板关系。HF 越高，PP相对就低。 使推挽信号幅度最大的条件是坑深为八分之一个波长(实际波长/PC料折射率）,而为了使高频信号最大需要坑深为四分之一个波长,故实际生产中为兼故两种信号实际子盘坑深介于两者之间(大约在100nm左右). * * 母盘涂胶厚度的影响因数 旋涂速度会影响涂胶的厚度。通常旋涂速度越快，涂胶的厚度相应变薄。 感光胶的浓度也会影响涂胶的厚度。浓度越高，相应的涂胶厚度就越厚。 对各种浓度的感光胶而言，旋涂速度到达一定值后，涂胶厚度就基本不变了。 * * 旋涂速度同涂胶厚度的关系 * * Asymmetry 同 Jitter 的关系 实验结果显示: jitter 同Asymmetry 的关系成抛物线状,在某一Asymmetry值时,jitter可达最低.在这一点周围,jitter 都相对升高. 一般,对CD母盘而言Symmetry 在-10~-12左右,jitter最低.DVD5母盘,Asymmetry在5-8左右,jitter最低. 所以在生产实践中,我们都要求母盘的Symmetry(CD) \ Asymmetry(DVD) 要 保持在此最佳点。. * * Asymmetry 同 Jitter关系图 仅参考此曲线,实际值有差异 * * Bye—bye! Thanks Very Much! * * * * * * NOTES: Note that the laser is only exposing the photoresist layer and thus not removing any material from the layer. After the laser beam recorder the pits are not there yet. Pits are only physically formed during the development process. * NOTES: The acid formed is carbon acid and this takes place by the chemical reaction of the photoresist when exposed to light below a certain wavelength (405 nm). At higher wavelength the photoresist does not react. The photo-resist can also be affected by normal light and therefore care has to be taken when storing the chemicals. For this reason, the mastering system is fitted with special (red) windows, that filter the light from outside so that the photoreist layer is not affected by this environmental light. * NOTES: * NOTES: The introduction of semi-conductor lasers has allowed the LBR optical path to be greatly simplified and has made alignment easier. Other disadvantages of the traditional laser are: High power consumption (7-8 kW) Water cooling continuously required Big size and heavy laser head, requiring a bigger