金属分析方法 第八讲 -聚焦束离子技术 FIB.ppt

材料学中常用的分析方法Instrumental Analysis in Materials Science 北京科技大学材料科学学院 唐伟忠 Tel: 6233 4144 E-mail: wztang@mater.ustb.edu.cn 第八讲 聚焦离子束技术 FIB（Focused ion beam） 液态金属离子源（LMIS） Dual column  FIB Ion beam assisted deposition  etching in FIB FIB applications: FIB 象衬度的形成机制 通道效应衬度（CCM）  二次电子、离子的产额还依赖于晶体相对于入射束的取向。当入射束方向与低指数方向重合，离子束进入晶体内很长距离才会停下来，即入射离子产生了通道效应。这导致离子与样品表面原子作用几率和二次电子产额显著降低，因而显示出通道效应衬度(晶粒衬度)。 In FIB, channeling contrast is more than 4 times as intense as that produced by EBSD in the SEM, and it results in spectacular grain contrast. FIM 样品断面分析步骤 FIB can minimize artifacts of mechanical preparation, as in this case Ni foam. IIE image reveals grain structure and porosity difficult to observe using other techniques. 证明了缺陷与基底材料的形貌密切相关，而薄膜的厚度则是均匀的 显示：不同厚度的薄膜中，不仅有柱状晶、织构，且存在晶粒的异常长大 After cutting the film with FIB, the buckle geometry and the discontinuity revealed film stress relaxation A: Pt 保护层, 其下为厚度10微米的表面腐蚀层 涂层磨损区断面的 FIB 观察 A failure feature within conductive lines: void formation The time difference between the imaging is 2 hours. Void formation results in a failure. FIB section of ink penetration into clay coated paper FIB section of ink penetration into clay coated paper （a）选择区域，沉积 Pt 溅射保护层，切割（b）倾斜进行断面观察（c）重复 a, b 过程（d）使用计算机将 2D 图象组合为 3D 图象 Parallel 2D FIB cross-sections indicate pile-up of material (arrow). 为使相邻晶粒显示通道衬度，在两个角度上进行了衬度观察 先倾斜80度做截面切割，然后转回30度，收集截面A的成分分布象。重复如上的过程，逐次获得B, C截面的成分图 By ion beam image of tire debris, internal microstructure was observed, without any preparation Rosette crystal (a) may be cut by FIB (b) and analyzed With FIB, successive slices of material (minimum thickness 50nm) can be removed. EBSD and EDX analysis can construct 3D image of the original microstructure Maps of misorientation at two nearby sections 3D view in vicinity of a Laves-phase particle. The Laves phase is colored blue. The warm-rolled Fe3Al phase with small misorientation of less than 2.5? are c