用于仿生自清洁微结构的干涉光刻技术研究-光学工程专业论文.docx

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用于仿生自清洁微结构的干涉光刻技术研究-光学工程专业论文.docx

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用于仿生自清洁微结构的干涉光刻技术研究-光学工程专业论文

关键词：激光干涉光刻；周期微结构；自清洁；表观接触角万方数据ResearchontheInterferenceLithographyTechnologyfortheMicro—structureofBionicSelf-cleaningSurfaceDiscipline：OpticalEngineeringStudentSignature：№锄玖SupervisorSignature：卫L一一-厶、幻L纠／么卅／AbstractCurrentlytherearesomegreatprogressesforartificialself-cleaningsurface．Some technologieshavebeenappliedinpractice，butthecommondisadvantagesoftheseexistingtechnologiesisthattheprocessaccordingtodemandscan’tbeadjustedflexibletoachievedesiredsurfacewettability．Soacontrollable，convenient，economicalandpracticalmethodisnecessarytobedeveloped．Basedontheinvestigatedofself-cleaningstructurepreparationmethods，thelimitationofthesemethodshasbeendiscussed．Combinedwiththecharacteristicsoftheself-cleaningstructureandtheinterferencelithographypattem，anewmethodforself-cleaningsurfacepreparationhasbeenproposed．Therequirementofself-cleaningstructurehasbeenanalyzedbyself-cleaningprinciple．Thefundamentalandtheimplement methodoflaserinterferencelithographyhasbeeninvestigated，thepattemshavebeensimulatedformulti-beamlaserinterferencebyMATLABprogram．Anumberoffactorsthataffectthelithographyresultshavebeenanalyzed．Basedonthesetheorieshavebeenresearched，theexperimentalsystemhasbeenbuilt，andanumberofexperimentalhasbeenresearched．Theresults showthat，theperiodicstructureformedbyinterferencelithographyissimilarwiththenaturalself-cleaningstructure．Micro—structureswithdifferentperiodandshapecanbeobtainedbasedondifferentprocessfordifferentdemands．Micro-structureswithdifferentperiodsfrom1-100pmhavebeenprepared．Thewettabilityofthesemicro-structureshavebeenMeasured，andcomparedwiththesmoothsurface．Theresultsshowthatthecontactsanglesofmicro-structuresurfacehasbeenincreasedordecreased，increasedby23％-68％，decreasedby14％-32％．Theself-cleaningfunctioncouldbecontrolledbylithographymicro—structure．Thisdissertationapplyinterferencelithographytechniqueinthepreparationofself-cleaningstructure，providedacontrolledtechniquetomodifythewettabilityofsurface．Theresultscouldprovidethetheoreticalandexperimentalbas