芯片内光波导环形谐振腔谐振特性分析-精密仪器及机械专业论文.docx

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2018-05-05 发布于上海
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芯片内光波导环形谐振腔谐振特性分析-精密仪器及机械专业论文.docx

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芯片内光波导环形谐振腔谐振特性分析-精密仪器及机械专业论文

ResonancecharacteristicsResearchofmicro-ringresonatorsAbstractMoore’slawprovesthatthemicroprocessorwillcontainnearly5billiontransistorsuntil2015.Andalongwiththerapiddevelopmentofinternetcommunication,basedonthetraditionalwayofthewireinterconnectionsystemhasbeenhardtocatchupwiththesteps.Thedistance,speed,powerconsumptionandotherfactorsisthechallengesbetweencircuitboardandchipforconnectionwire.Sousingopticalinterconnectioninsteadofelectricityinterconnectionisakindofinevitabletrend,andopticalsolutionmustbecost-effiencyifitistobeappliedtothemassmarket.Inthesecontexts,theringresonatorscavitystructurebasedoninsulatorsiliconsilicon-on-insulator(SOI)moreandmoregettheattentionofscholarsathomeandabroad.DuetotheabilitytoutilizeexistingCMOSfabricationfacilities,siliconphotonicdevicescanbeintegratedinthechip.Sothat,thisstructurehastheincomparableadvantageforapplicationsrangingfromthephotoelectricintegrationandopticalinterconnectionUndertheguidanceofthelatestachievementsinthecurrentinternational,aimingtomilitaryandcivilianneeds,someresearcharoundmicro-ringcavitieshavebeendoneinthispaper.Themainworksareasfollows.Inthisthesis,wefirstintroducetheprincipleofmicroringresonatorandanalysistheirtransmissionproperty;TheringresonatorstructureandverticalgratingcouplingsystemissimulatedbyOpticalnumericalsimulationsoftware(BPM、FDTD);WiththehelpofCooperationUnitaboutmicro-machiningline（EBL,ICP,etc）,theabove-mentionedoptimizeddesignofmicro-ringresonatorwasrealized;Morphologywastestedtocomparethedesigning andthe physicalparameters.Accordingtothetwocouplingscheme,theappropriatedtestsystem has beensetuprespectivelyandagood testresultsisobtained.(Micro-ringresonatorhasaqualityfactorabout104andthebistable phenomenonisobserved)Layagoodfoundationfortheresearchonopticalwaveguide ringresonatorsdevices;Onthebasisof thetestresults, akind ofall-opticallogicgatehasbeendesigned based onthenonlineareffectsofringresonator.Keywords: Micro-Ring resonator, Silicon on insulator (SOI), Optical Interconnection,Quali